Kla tencor sp2 manual

Details for SP2 XP Inspection System by KLA-Tencor. Contact FabExchange for more information on the SP2 XP Inspection System for sale. This SP2 XP Inspection System was manufactured in by KLA-Tencor. Site measurements trend together v ery well in the 4 different KLA-Tencor Sp ectraShape tools, showing that the KLA-Tencor SpectraSh ape tool offers excellent matching pe rf ormance even. KLA Corporation Datasheets for Semiconductor Metrology Instruments. Semiconductor metrology instruments are designed for wafer and thin film in-line inspection after semiconductor processing. They include capacitance gages, C-V systems, electron beam probes, ellipsometers, interferometers, I-V system, magnetometers, optical systems.

≥4Xnm Surfscan SP-A3 3Xnm Surfscan SP3 2Xnm Surfscan SP5 1Xnm Surfscan SP5XP 7nm Surfscan SP7 ≤5nm Surfscan SP7XP. Brochure KLA SUPPORT. Item id, model Surfscan SP1 DLS manufactured by KLA-Tencor. Load/unload button for manual delivery hand-off. c. Cassette Surfscan SP1/TBI and SP1/DLS BPS board We have more spare parts for with all original packaging including manuals, warranty forms, etc. if orignally SP1. SP1 DLS. SP2. SP2XP. SP3. KLA SP1 TBI cycling wafers after refurbishment in our Class cleanroom at ClassOne Equipment.

22 ກ.ລ. "The visible-light Surfscan SP1 and the UV-illuminated Surfscan SP2 were well received by the industry; in fact, Surfscan tools can be found in. reproduced without permission from KLA-Tencor Corporation. Wafer inspection systems such as Surfscan SP1 and SP2 detect. 17 ສ.ຫ. new and smaller defects — a challenge that KLA-Tencor's suite of Surfscan SP2 ™ and Surfscan ® SP2 XP products are designed to detect.